Lam Research Unveils ALTUS® Halo: A Game Changer in Semiconductor Metallization

On February 19, 2025, Lam Research Corporation (Nasdaq: LRCX) announced a groundbreaking innovation in the semiconductor industry with the launch of ALTUS® Halo, the first atomic layer deposition (ALD) tool designed to utilize molybdenum for advanced semiconductor manufacturing. This announcement marks a significant milestone as the industry transitions from traditional tungsten-based methods to more efficient and effective solutions, meeting the growing demands of next-generation applications.

As the semiconductor industry continues to evolve, the demand for advanced manufacturing techniques that can keep pace with the performance requirements of new technologies has intensified. Molybdenum, recognized for its low resistivity and void-free fill capabilities, emerges as a vital alternative to tungsten, which has dominated the market for over two decades. Lam Research's ALTUS Halo is poised to redefine metallization processes by providing chipmakers with the ability to manufacture leading-edge chips that are essential for applications in artificial intelligence (AI), cloud computing, and next-generation smart devices.

Sesha Varadarajan, Senior Vice President and General Manager of the Global Products Group at Lam Research, highlighted the significance of ALTUS Halo, stating, "Building on Lam's deep metallization expertise, ALTUS Halo is the most significant breakthrough in atomic layer deposition in over 20 years." This new tool combines Lam's quad station module architecture with advancements in ALD technology to enable high-precision, low-resistivity molybdenum deposition critical for scaling complex semiconductor architectures, including 1,000-layer 3D NAND and advanced gate-all-around logic.

Molybdenum's lower resistivity in nano-scale applications allows for faster signal transmission, an essential feature for modern semiconductors. Unlike tungsten, which requires additional barrier layers to avoid electrical interactions, molybdenum simplifies the metallization process by eliminating these layers. This reduction in process steps not only enhances efficiency but also improves overall chip speed, addressing potential bottlenecks that could arise as devices continue to scale.

ALTUS Halo is currently in volume production, with early adoption reports indicating its integration at leading high-volume 3D NAND manufacturers in Korea and Singapore. The tool's capabilities are set to revolutionize the production of advanced logic and memory chips. Mark Kiehlbauch, Corporate Vice President of NAND Development at Micron, remarked, "The integration of molybdenum metallization enables Micron to be first to market with industry-leading I/O bandwidth and storage capacity in the latest generation of NAND products." This endorsement underscores the significant implications of ALTUS Halo for mass production and competitive advantage in the semiconductor landscape.

Lam Research's introduction of ALTUS Halo signals a transformative shift in semiconductor metallization practices. By leveraging molybdenum's unique properties, the company not only addresses the challenges posed by traditional tungsten methods but also sets the stage for future innovations in the semiconductor industry. As ALTUS Halo ramps up production and adoption among major chipmakers, it promises to enhance the performance and efficiency of next-generation semiconductor devices critical to emerging technologies.

Lam Research Corporation is a global leader in providing innovative wafer fabrication equipment and services to the semiconductor industry. The company is dedicated to enabling its customers to build smaller and better-performing devices, reinforcing its commitment to technological leadership and customer satisfaction.

For more information, visit Lam Research's website.

This press release contains forward-looking statements regarding the company's future performance and market trends. Readers are encouraged to review the risk factors outlined in Lam Research's filings with the Securities and Exchange Commission for a better understanding of the uncertainties that could affect these statements.